Newport XPS-D Programmer's Manual

XPS Unified Programmer’s Manual
6.3 TZ Group
A TZ group is a 3-positioner object, like the XYZ group, but with the following
differences:
• It supports the PVT trajectories.
• It does not support 3D spline trajectories.
• It supports TZDecoupling, XYtoZZZAccelerationFeedforward and TZTracking
functionalities.
• It supports Focus process via the XPS focus interface board and focus process
module (focus.out).
• It has a specific way of initialization
(MotorDriverInterface = AnalogAccelerationTZ).
EDH0373En1023 — 01/18 34

Newport XPS-D Specifications

General

Brand	Newport
Model	XPS-D
Category	Controller
Language	English