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Newport XPS-D - Singleaxistheta Group

Newport XPS-D
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XPS Unified Programmer’s Manual
6.2 SingleAxisTheta Group
The SingleAxisTheta is composed of one single positioner object with three encoders
(Theta encoder) for the execution of motion commands. It includes a “Yaw” mapping
and a “Theta” correction on an XY group.
A SingleAxisTheta group CANNOT be used in GANTRY mode (secondary positioner
is impossible).
31 EDH0373En1023 01/18

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