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Newport XPS-D - Positionercompensationspatialperiodicnotchsset

Newport XPS-D
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XPS Unified Programmer’s Manual
7.2.1.204 PositionerCompensationSpatialPeriodicNotchsSet
Name
PositionerCompensationSpatialPeriodicNotchsSetSets pre-feedforward
compensation spatial periodic filters parameters.
Input tests
- Refer to section 7.1: “Input Tests Common to all XPS Functions”.
- Checks correcor type: (-8)
- Checks parameter values: (-17)
SpatialNotchStep
SpatialNotchBandwidth
NOTE
Refer to system.ref file to get CorrectorISRPeriod and stages.ini for
MaximumVelocity values.
Description
This function sets the CompensationSystemPreFeedForward spatial periodic filters
parameters. These filters reduce the spatial periodic perturbations coming from screw
pitch or cogging.
Note that the CompensationSystemPreFeedForward feature is available for all corrector
types (acceleration, velocity, voltage or position) functioning in closed loop
configuration.
SpatialNotchStep1.
SpatialNotchsBandwidth1.
SpatialNotchsGain1.
SpatialNotchStep2.
SpatialNotchsBandwidth2.
SpatialNotchsGain2.
SpatialNotchStep3.
SpatialNotchsBandwidth3.
SpatialNotchsGain3.
EDH0373En1023 01/18 316

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