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Newport XPS-D - Positionercorrectorpidffvelocityset

Newport XPS-D
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XPS Unified Programmer’s Manual
7.2.1.223 PositionerCorrectorPIDFFVelocitySet
Name
PositionerCorrectorPIDFFVelocitySetSets PIDFFVelocity corrector parameters.
Input tests
- Refer to section 7.1: “Input Tests Common to all XPS Functions”.
- Checks the positioner type and the corrector type: (-8)
- Checks parameter value: (-17)
KP ≥0.
KI ≥0.
KD ≥0.
0 ≤KS ≤1.
IntegrationTime ≥CorrectorISRPeriod.
GKP >-1.
GKI >-1.
GKD >-1.
KForm ≥0.
KFeedForwardVelocity ≥0.
DerivativeFilterCutOffFrequency
NOTE
Refer to system.ref file to get CorrectorISRPeriod value.
Description
This function configures the “PIDFFVelocity” corrector parameters.
NOTE
The “CorrectorType” parameter must be defined as “PIDFFVelocity” in the
stages.ini file else (-8) error is returned. This servo loop type is used when a
constant value applied to the driver results in a constant velocity of the stage.
EDH0373En1023 01/18 350

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