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Newport XPS-D
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XPS Unified Programmer’s Manual
Output parameters
Header char * Type1, Type2 or Type3.
TimeStamp charhex32 * Internal counter in milliseconds.
1DFe charhex32 * 1D+ following error in µm.
1DPos charhex32 * 1D+ current position in µm.
XFe charhex32 * X following error in µm.
XPos charhex32 * Yaw following error in µm.
YawFe charhex32 * Yaw current position in µm.
YFe charhex32 * Y following error in µm.
YPos charhex32 * Y current position in µm.
XMotor charhex32 * X motor current in 1/10000 full scale.
YMotor charhex32 * Y motor current in 1/10000 full scale.
XSinCos charhex32 * X Sin Cos in Volts.
YSinCos charhex32 * Y Sin Cos in Volts.
Return (In addition to the results of “Input Tests Common to all XPS
Functions”)
0: No error.
-100: Internal error (memory allocation error, …).
-136: Wrong parameter type in the command string: charhex32 * expected.
EDH0373En1023 01/18 618

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