Setup & Operation 2. Specifications
28 N6 Rev.2
*8: The exhaust system in the Cleanroom model Manipulator draws air from the base interior and arm cover
interior. A crack or other opening in the base unit can cause loss of negative air pressure in the outer part
of the arm, which can cause increased dust emission. Do not remove the covers.
Seal the exhaust port and the exhaust tube with vinyl tape so that the joint is airtight. If the exhaust flow
is not sufficient, dust particle emission may exceed the specified maximum level.
Number of particles of 28317cm
3
: 1cft or larger in a sample air
(28317cm
3
:1cft) around the center of the motion area = less than 2832 particles)
Fitting for ø10 mm mm pneumatic tube
(Refer to Setup & Operation: 3.6 User Wires and Pneumatic Tubes.)
60 L/min vacuum
Outer diameter: ø10mm (Inner diameter:ø6-7 mm)
ESD specification uses resin materials with antistatic treatment. This model controls adhesion of dust
due to electrostatic charge.
*9: In general use, Accel setting 100 is the optimum setting that maintains the balance of acceleration and
vibration when positioning. Although values larger than 100 can be set to Accel, it is recommended to
minimize the use of large values to necessary motions since operating the manipulator continuously with
the large Accel setting may shorten the product life remarkably.
*10: Expect to support KC Marking / KCs Marking from shipment in September, 2018.
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