MKS 146C - Chapter Four: Operation in Normal Mode; General Information

Inside the Type 146 Unit Cha
p
ter Three: Overview
78
Torr m
Torr Torr
HOLD
4
mTORR
Normal Mode
Torr mTorr Torr
LEAKAGE
HOLD
TORR
4
Leaka
g
e Mode
TUNING
HOLD
2
TORR
Tunin
g
Mode
CLOSE
TORR
SETUP
TRIP POINT
Setup Mode
Torr
OPEN
AUTO
CLOSE
HOLD
MANUAL
TORR
4
Control Mode
(requires the
Control Board
)
(requires the
Control Board
)
Figure 21: Sample Display for Each Mode
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