MKS 146C - Control Messages; Table 70: General Control Messages; Table 71: Chapter References for General Control Messages

Command Messages Cha
p
ter Nine: RS-232 Communications
270
Control Messages
The control messages are separated into three categories: General; Control Adjust; and Recipe
Specific messages.
Note
The General and Control Adjust messages support Control Channel 0,
which is a virtual control channel used by the MFC board for Ratio flow
control. A “virtual” channel exists in software only; it does not require a
physical board to function. Refer to
Mass Flow Control,
page 93, for
information on Ratio control for flow controllers.
General Control Messages
Message Description Message Format
@
command
category
command
number
Parameter
(Control
channel)
Data
Optional
checksum
Select Control Mode @ 0 2 1
0,* 1
: A = Auto
O=Open
C = Close
H=Hold
M = Manual
CR
c1 c2
Select Active Recipe @ 0 2 2
0,* 1
: 1, 2, 3, or 4
(recipe #)
CR
c1 c2
Select Controller
Polarity
@0 2 3
0,* 1
: D = Direct
R = Reverse
CR
c1 c2
*Control channel 0 is a virtual control channel used in conjunction with Mass Flow Controllers
Table 70: General Control Messages
Table 71 lists the chapter that explains the function performed by each message.
Chapter References for General Control Messages
Function Chapter
Select Control Mode
Chapter Eight: Operation in Control Mode
Select Active Recipe
Chapter Eight: Operation in Control Mode
Select Controller Polarity
Chapter Seven: Operation in Setup Mode
Table 71: Chapter References for General Control Messages
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