MKS 146C - Thermocouple; Figure 61: Sensor Calibration for Thermocouples

How To Perform Sensor Calibration/MFC Setup Cha
p
ter Seven: O
p
eration in Setu
p
Mode
202
Thermocouple
RIGHT DISPLAY
LEFT DISPLAY
SETUP
SENSOR CAL
The number for the input
channel is entered here.
In this example, channel 2
is selected as the input
channel.
This indicates the type of
g
au
g
e associated with the
selected input channel.
The codes are 1A for an
MKS TC-1A
g
au
g
e, d6 for
a Hastin
g
s DV-6M
g
au
g
e.
There are three
g
as types which may be selected:
n2 (nitro
g
en, as in this case), HE (helium), and Ar (ar
g
on).
MAIN DISPLAY
Figure 61: Sensor Calibration for Thermocouples
The thermocouple gauge codes are
1A
for the MKS TC-1A, and
d6
for the Hastings DV-6M
gauge. The gauge type is automatically determined when a channel is initialized.
Note
The thermocouple type, displayed in the right hand display, cannot be
changed through this screen. The 146 unit determines the thermocouple
type when the channel is powered on.
The display also lists the type of gas selected, either
n2
(nitrogen),
HE
(helium), or
Ar
(argon).
Refer to
How To Perform Sensor Calibration/MFC Setup
, page 190, for steps 1 through 3.
4. Verify that the 146 unit has correctly determined the gauge type. The gauge type is
displayed in the right display.
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