MKS 146C - Table 41: Ranges for Zeroing a Sensor

How To Zero a Sensor/MFC Cha
p
ter Five: O
p
eration in Leaka
g
e Mode
136
Ranges For Zeroing A Sensor
Sensor Type Zero Range
Type 107 Capacitance Manometer -0.2 Volts to +0.2 Volts
Type 120 Capacitance Manometer -0.8 Volts to +0.8 Volts
Linear Capacitance Manometer -0.3 Volts to +0.3 Volts
Pirani Type Gauges Gauges can always be zeroed
Cold Cathode Gauges Gauges cannot be zeroed
Hot Cathode Gauges Gauges cannot be zeroed
Mass Flow Controller
±
0.5 Volts
Table 41: Ranges for Zeroing a Sensor
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