MKS 146C - Pirani and Convection Gauges; Figure 57: Calibration for Pirani and Convection Gauges

How To Perform Sensor Calibration/MFC Setup Cha
p
ter Seven: O
p
eration in Setu
p
Mode
194
Pirani and Convection Gauges
CENTER DISPLAY
RIGHT DISPLAY
LEFT DISPLAY
CLOSE
SETUP
SENSOR CAL
The number for the input
channel is entered here.
In this example, channel 2
is selected as the input
channel.
This indicates the type of
g
au
g
e associated with the
selected input channel.
The codes are P for
Pirani (shown in this
example) Cn for Convectron,
and CP for HPS CEP.
This indicates either a
Factory (F), or User (U)
defined ZERO (left
character) and SPAN
(ri
g
ht character).
In this case, the ZERO
is User-defined, and the
SPAN is Factory-defined.
There are three
g
as types which may be selected:
n2 (nitro
g
en, as in this case), HE (helium), and Ar (ar
g
on).
MAIN DISPLAY
Figure 57: Calibration for Pirani and Convection Gauges
The sensor type codes are
P
for Pirani,
Cn
for Convectron, and
CP
for HPS CEP (Convection
Enhanced Pirani). Sensor type, whether Pirani or convection, is automatically determined when
a channel is initialized. However, the 146 unit cannot distinguish between the two convection
gauges: Convectron and CEP. The default convection gauge selection is the Convectron gauge.
If you are using a CEP gauge, you must change the convection gauge type to CEP. No
additional commands are required if you are using either a Convectron gauge or a standard Pirani
gauge.
The display also lists the type of gas selected, either
n2
(nitrogen),
HE
(helium), or
Ar
(argon).
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