MKS 146C - Capacitance Manometer Messages

Capacitance Manometer Messages A
pp
endix G: Board S
p
ecific Commands
316
Capacitance Manometer Messages
The 146 supports a wide variety of MKS capacitance manometers. Refer to Table 9, page 49, for
a complete list of transducers.
Capacitance Manometer Messages
Function Description Command Range and Restrictions
Power Channel
power
@081<para>:<state> <para> is the channel number 1, 2, 3, or 4
<state> is ON for on; OFF for off
Sensor must be installed
Configuration Sensor full
scale
@061<para>:<fs> <para> is the channel number 1, 2, 3, or 4
<fs> 0.001 to 100,000 Torr equivalent
Sensor must be installed
Sensor type must be linear or Type 120
Sensor
resolution
@062<para>:<res> <para> is the channel number 1, 2, 3, or 4
<res> is an ASCII value that represents the
resolution as a power of 10, from +7 to -7.
Sensor type must be linear or Type 120
Calibration Zero
function
@056<para>:<state> <para> is the channel number 1, 2, 3, or 4
<state> is ON for on; OFF for off
Sensor must be installed
Zero
channel
@051<para> <para> is the channel number 1, 2, 3, or 4
Command only
Zero function must be on
Auto zero
function
@058<para>:<state> <para> is the channel number 1, 2, 3, or 4
<state> is E for enabled; D for disabled
Select auto
zero
reference
sensor
@059<para>:<ref> <para> is the channel number 1, 2, 3, or 4
<ref> is the reference channel number
Both sensors must be installed
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