MKS 146C - Table 60: Sensor Configuration Parameters for each Gauge Type; Table 61: Chapter References for Sensor Configuration Messages

Command Messages Cha
p
ter Nine: RS-232 Communications
264
Sensor Configuration Parameters for Each Gauge Type
Gauge Type Configuration Parameter
Pirani or Convection Gas Type
Convection Gauge Type (convection gauges only)
Hot Cathode Sensitivity
High Pressure Shutoff
Disconnect Threshold
Cold Cathode Gauge Correction Factor
Disconnect Threshold
Capacitance Manometer Sensor Range
Resolution (except Type 107 unit)
Mass Flow Controller Range
Thermocouple Thermocouple Type (detected at power up)
Gas Type
Table 60: Sensor Configuration Parameters for Each Gauge Type
Chapter References for Sensor Configuration Messages
Function Chapter
Channel Range
Chapter Seven: Operation in Setup Mode
Channel Resolution
Chapter Seven: Operation in Setup Mode
Channel Gas Type
Chapter Seven: Operation in Setup Mode
Channel Gauge Factor/Sensitivity
Chapter Seven: Operation in Setup Mode
Ion Gauge Disconnect Threshold
Chapter Seven: Operation in Setup Mode
Hot Cathode High Pressure Shutoff
Chapter Seven: Operation in Setup Mode
Hot Cathode Fast Pressure Rate of Rise Shutoff
Chapter Seven: Operation in Setup Mode
Table 61: Chapter References for Sensor Configuration Messages
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