MKS 146C - Mass Flow Controller Messages; Table 62: Mass Flow Controller Messages; Table 63: Chapter References for Mass Flow Controller Messages

Chapter Nine: RS-232 Communications Command Messa
g
es
265
Mass Flow Controller Messages
The Mass Flow Controller board enables the 146 unit to communicate with mass flow controllers
to regulate the flow of gas into a system.
Mass Flow Controller Messages
Message Description Message Format
@
command
category
command
number
Parameter Data
Optional
checksum
Mode of Operation @ 1 0 1
1, 2, 3, or 4
(channel #)
: R = Ratio
S = Set Point
T = Totaling
CR
c1 c2
Adjust Set Point @ 1 0 2
1, 2, 3, or 4
(channel #)
:
0.0002 to
1 x 10
5
sccm
CR
c1 c2
Totaling Co-channel @ 1 0 3
1, 2, 3, or 4
(channel #)
:
1, 2, 3, or 4
(co-channel #)
CR
c1 c2
Open/Close/Cancel
Override
@1 0 4
1, 2, 3, or 4
(channel #)
: O = Open
C = Close
N = Cancel
CR
c1 c2
Table 62: Mass Flow Controller Messages
Table 63 lists the chapter that explains the function performed by each message.
Chapter References for Mass Flow Controller Messages
Function Chapter
Mode of Operation
Chapter Seven: Operation in Setup Mode
Adjust Set Point
Chapter Seven: Operation in Setup Mode
Totaling Co-channel
Chapter Seven: Operation in Setup Mode
Open/Close/Cancel Override
Chapter Seven: Operation in Setup Mode
Table 63: Chapter References for Mass Flow Controller Messages
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