MKS 146C - Table 74: Recipe Specific Messages; Table 75: Chapter References for Recipe Specific Messages

Command Messages Cha
p
ter Nine: RS-232 Communications
272
Recipe Specific Messages
Message Description Message Format
@
command
category
command
number
Parameter Data
Optional
checksum
Adjust Set Point @ 0 4 1
1, 2, 3, or 4
(recipe #)
:
±
100,000 Torr
CR
c1 c2
Adjust Lead @ 0 4 2
1, 2, 3, or 4
(recipe #)
:
0.001 to 1000
CR
c1 c2
Adjust Gain @ 0 4 3
1, 2, 3, or 4
(recipe #)
:
0.001 to
10,000
CR
c1 c2
Select Softstart @ 0 4 4
1, 2, 3, or 4
(recipe #)
: E = Enable
D = Disable
CR
c1 c2
Select Analog Set
Point
@0 4 5
1, 2, 3, or 4
(recipe #)
: D = Digital
A=Analog
CR
c1 c2
Adjust Analog Set
Point Range
@0 4 6
1, 2, 3, or 4
(recipe #)
:
0 to 100,000
Torr
CR
c1 c2
Select Control
Channel
@0 4 7
1, 2, 3, or 4
(recipe #)
:
1, 2, 3, or 4
(channel #)
CR
c1 c2
Table 74: Recipe Specific Messages
Table 75 lists the chapter that explains the function performed by each message.
Chapter References for Recipe Specific Messages
Function Chapter
Adjust Set Point
Chapter Six: Operation in Tuning Mode
Adjust Lead
Chapter Six: Operation in Tuning Mode
Adjust Gain
Chapter Six: Operation in Tuning Mode
Adjust Softstart
Chapter Seven: Operation in Setup Mode
Adjust Analog Set Point
Chapter Seven: Operation in Setup Mode
Adjust Analog Set Point Range
Chapter Seven: Operation in Setup Mode
Select Control Channel
Chapter Seven: Operation in Setup Mode
Table 75: Chapter References for Recipe Specific Messages
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com