MKS 146C - Table 39: Ranges for Zeroing a Sensor

Chapter Four: Operation in Normal Mode How To Zero a Sensor/MFC
111
Ranges for Zeroing a Sensor
Sensor Type Zero Range
Type 107 Capacitance Manometer -0.2 Volts to +0.2 Volts
Type 120 Capacitance Manometer -0.8 Volts to +0.8 Volts
Linear Capacitance Manometer -0.3 Volts to +0.3 Volts
Pirani Type Gauges Gauges can always be zeroed
Cold Cathode Gauges Gauges cannot be zeroed
Hot Cathode Gauges Gauges cannot be zeroed
Mass Flow Controller
±
0.5 Volts
Table 39: Ranges for Zeroing a Sensor
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com