MKS 146C - Code 17 X: How to Set up the MFC; Figure 81: Code 17 X Display

Chapter Seven: Operation in Setup Mode Code 17x: How To Set U
p
the MFC
241
Code 17x: How To Set Up the MFC
SETUP
CODE
CENTER DISPLAY
RIGHT DISPLAY
LEFT DISPLAY
The code number is
displayed and edited
here.
In this example, the
code number is 17x,
where x represents
the channel number
of a mass flow controller.
This is the number for the
co-channel (only used
when the MFC is set up
in the Totalin
g
mode
of operation).
This display selects the mode of
operation, either set point (SP),
totalin
g
(to), or ratio (rA).
MAIN DISPLAY
This is the MFC set point for use in either the
set point or totalin
g
modes of operation. For the
ratio mode, this entry is the ratio parameter.
Note:
The unit for the set point entry is sccm.
Figure 81: Code 17x Display
The
x
in the code number represents the channel number for the mass flow controller (MFC).
The three modes of operation for an MFC are
Set Point, Totaling,
and
Ratio
. The different
modes are indicated by codes in the right display:
SP
for Set Point;
to
for Totaling; and
rA
for Ratio.
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