Chapter Six: Operation in Tuning Mode General Information
153
TUNING
MANUAL
TORR
SET POINT
Torr
LEFT DISPLAY
CENTER DISPLAY
RIGHT DISPLAY
This is the pressure reading
from the gauge on the
control channel.
The LEAD value for the
selected recipe is shown here.
You must select a recipe
before you can edit the
LEAD parameter.
The GAIN value for the
selected recipe is shown here.
You must select a recipe
before you can edit the
GAIN parameter.
MAIN DISPLAY
This is the SET POINT value for the selected recipe.
In this example, SET POINT is the parameter which
is selected for editing.
You must select a recipe before you can edit the
SET POINT parameter.
Figure 42: The
SET POINT
legend displayed in Tuning Mode
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