MKS 146C - Table 27: Control Valves and Cables; Table 28: Flow Controllers and Cables

Chapter Three: Overview Inside the T
yp
e 146 Unit
71
Control Valves and Cables
Valve Type MKS Valve Part Number for Cable
Solenoid 148, 248 CB251-2-10, CB251S-2-10
Smart Throttle (not powered by the 146) 153 CB153-4-10, CB153S-4-10
Smart Throttle (powered by the 146) 153 CB153-13-10, CB153S-13-10
High Flow Solenoid 154 CB251-2-10 w/ CB-248-1 adapter
CB251S-2-10 w/ CB-248-1 adapter
Table 27: Control Valves and Cables
Flow Controllers and Cables
Equipment Description MKS Product Cable Number
4 Channel flow, with CRT 147 CB146-3, CB146S-3
1 Channel Flow 246 CB246-3, CB246S-3
4 Channel Flow 247 CB247-9, CB247S-9
Table 28: Flow Controllers and Cables
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com