MKS 146C - Figure 83: Control Mode Screen

General Information Cha
p
ter Ei
g
ht: O
p
eration in Control Mode
248
Torr
OPEN
AUTO
CLOSE
HOLD
MANUAL
TORR
4
This is the current valve
position, expressed as
a percent of the valve
control si
g
nal output.
This example shows a
settin
g
of 20.1% of the
valve control si
g
nal output.
The active recipe is
selected in this displa
y
.
In this example, recipe
4 is the active recipe.
The set point for the active
recipe is entered here. OR,
if an analo
g
set point is bein
g
used, the analo
g
set point value
is displa
y
ed here.
LEFT DISPLAY
CENTER DISPLAY RIGHT DISPLAY
The current pressure readin
g
from
the control channel is displa
y
ed here.
MAIN DISPLAY
This is a list of valve control positions. The
arrow ke
y
s on the ke
y
board scroll the selectin
g
arrow throu
g
h the list of valve positions.
In this example, AUTO is selected, so the 146 unit
will control accordin
g
to the control parameters in
the active recipe (recipe 4 in this example).
Figure 83: Control Mode Screen
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