Chapter Three: Overview Inside the T
e 146 Unit
63
Mass Flow Controller Board
On the end of the Mass Flow Controller (MFC) board is a 15-pin female Type “D” connector.
The table below shows the connector pinout. A list of MKS mass flow controllers, along with
their cables, is shown in Table 20, page 64.
Mass Flow Controller Connector Pinout
Pin Number Assignment
1 No Connection
2 Signal In +
3 Valve Close output (active low open collector)
4 Valve Open output (active low open collector)
5 Power Ground
6 -15 Volts
7 +15 Volts
8 Set Point Signal Output
9 Fault Input (active low TTL): Reserved
10 Open
11 Set Point Remote Sense
12 Signal Common
13 No Connection
14 No Connection
15 Chassis Ground
Table 19: Mass Flow Controller Connector Pinout
Note
A “No Connection” assignment indicates that the pin has no internal
connection.
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