MKS 146C - Appendix F: Underrange and Overrange Values

Appendix F: Underrange and Overrange Values Underran
g
e and Overran
g
e Values
313
Appendix F: Underrange and Overrange Values
Underrange and Overrange Values
Sensor Type Gas Type Overrange Value UnderrangeValue
Cold Cathode 1.05 x 10
-2
Torr 1.05 x 10
-12
Torr
Hot Cathode 1.05 x 10
-2
Torr 1.05 x 10
-12
Torr
HPS Pirani Nitrogen 1050 Torr 1.05 x 10
-5
Torr
Helium 57.75 Torr 1.05 x 10
-5
Torr
Argon 1108.8 Torr 1.05 x 10
-5
Torr
Convectron Nitrogen 1060.5 Torr 1.05 x 10
-5
Torr
Helium 57.75 Torr 1.05 x 10
-5
Torr
Argon 1108.8 Torr 1.05 x 10
-5
Torr
HPS CEP Nitrogen
Helium
Argon
107 Capacitance Manometer
Varies
- 1100 Torr or
upper limit of sensor,
whichever is less
Varies with sensor
120 Capacitance Manometer +105% of sensor range -105% of sensor range
All other Linear Capacitance
Manometers
+105% of sensor range -105% of sensor range
Thermocouple
MFC
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com