MKS 146C - Appendix A: Product Specifications; Physical Specifications

Command Messages Cha
p
ter Nine: RS-232 Communications
278
Response Format for Read Only Data Messages (Continued)
Message Response* Description
Alarm Status @60B:<para><status>
where <para> A, B, C, or D
<status> is
E = Enabled
D = Disabled
T = Tripped
Control Mode @60C:<over><mode>
where <over> is: 0 = No override
1 = Override enabled
<mode> is:
A = Auto
O = Open
C = Close
M = Manual
H = Hold
Current Recipe @60D:<over><recipe> where <over> is: 0 = No override
1 = Override enabled
<recipe> is: An ASCII string, from 1 to 4
PID Set Point @60E:<type><sp> where <type> is: analog set point
digital set point
<sp> is: An ASCII string
* All response messages terminate in a CR as the end-of-line delimiter
Table 79: Response Format for Read Only Data Messages
Chapter References for Read Only Data Messages
Function Chapter
Channel Pressure
Chapter Four: Operation in Normal Mode
Channel Pressure with Time Stamp
Applies to RS-232 messages only

see below
Channel Voltage
Chapter Seven: Operation in Setup Mode
Ion Current
Chapter Seven: Operation in Setup Mode
Emission Current
Chapter Seven: Operation in Setup Mode
Pressure Leak Rate
Chapter Seven: Operation in Setup Mode
Table 80: Chapter References for Read Only Data Messages
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