MKS 146C - Power Control Messages

Chapter Seven: Operation in Setup Mode Code 15x: How To Set U
p
the Analo
g
Set Point
237
1000 Torr set point. The acceptable analog input voltage range is 0 to 10 Volts, with the default
full scale voltage set at 5 Volts. The full scale set point pressure can range from 0 to 100,00
Torr; 1000 Torr is the default. The ability to define the set point through an analog input is
disabled by default.
5
Analo
g
Set Point (Torr)
Analo
g
set point is a volta
g
e input that
determines the analo
g
set point.
I
n
p
u
t
V
o
l
t
a
g
e
2.5
0
0 500
1000
Figure 79: Graph Showing Analog Set Point Defaults
The lower and upper points of the analog input voltage range can be altered in Normal and
Leakage Modes, however to do so the current analog input voltage must be altered. To change
the upper point (not the lower point), independent of the current analog input, use Code 15x.
1. Repeatedly press the [
DISPLAY MODE
] key until the 146 unit is in Setup Mode.
The system responds by scrolling through modes.
2. Use the arrow keys to scroll to the
CODE
legend.
The system responds by causing the left display to blink.
3. Enter the number
15x
(where
x
represents the recipe number), and press the
[
ENTER
] key.
The system responds by displaying the appropriate parameters for code 15x, and causing
the main display to blink.
4. Enter the full scale set point pressure value from 0 to 100,000 Torr (the default is 1000
Torr).
A. If the display is correct, press the [
ENTER
] key.
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