MKS 146C - Table 20: Mass Flow Controllers and Cables

Inside the Type 146 Unit Cha
p
ter Three: Overview
64
Mass Flow Controllers And Cables
MFC And Cable Type Part Number
All MKS Mass Flow Controllers except Types
1749/1759
Consult the factor
y
for a com
p
lete list of
MFC types, ranges, and part numbers
Cable for MFCs w/ Edge Card connector CB147-7
Cable for MFCs w/ 15-pin Type “D” connector CB147-1, CB147S-1
Cable for MFCs w/ 9-pin Type “D” connector CB147-12, CB147S-12
Table 20: Mass Flow Controllers and Cables
Note
You must use the a
pp
ro
p
riate CB147-X cable to enable the MFC override
commands. The CB259-5 and CB259-10 cables do not support the open
and close override commands. However, using these cables will not
damage either unit.
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