MKS 146C - How to Command an MFC Open Override; How to Command an MFC Close Override

How To Command an MFC Open Override Cha
p
ter Five: O
p
eration in Leaka
g
e Mode
146
How To Command an MFC Open Override
A mass flow controller (MFC) moves to full open from any position within two seconds when
commanded with an open override.
1. Repeatedly press the [
DISPLAY MODE
] key until the 146 unit is in Leakage Mode.
The system responds by scrolling through modes.
2. Press the
key, followed by [1], [2], [3], or [4].
The system responds by moving the MFC on the selected channel to full open within 2
seconds.
Note
You must use the appropriate CB147-X cable, listed in Table 20, page
64, to enable the MFC override commands. The CB259-5 and CB259-
10 cables do not support the open and close override commands.
However, using these cables will not damage either unit.
How To Command an MFC Close Override
A mass flow controller (MFC) moves to full close from any position within two seconds when
commanded with a close override.
1. Repeatedly press the [
DISPLAY MODE
] key until the 146 unit is in Leakage Mode.
The system responds by scrolling through modes.
2. Press the
key, followed by [1], [2], [3], or [4].
The system responds by moving the MFC on the selected channel to full close within 2
seconds.
Note
1. The close override provides a fully closed condition, and in most
cases can be used to zero the MFC (zero flow).
2. You must use the appropriate CB147-X cable, listed in Table 20,
page 64, to enable the MFC override commands. The CB259-5 and
CB259-10 cables do not support the open and close override
commands. However, using these cables will not damage either unit.
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