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MKS 146C - Page 216

MKS 146C
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Chapter Seven: Operation in Setup Mode How To Perform Sensor Calibration/MFC Setu
p
193
5. Enter the sensor resolution in the center display.
Sensor resolution is the smallest pressure that can be displayed above or below zero. The
sensor resolution
range
for a Type 120 gauge or linear capacitance manometer is
±7 decades.
The default resolution for
all
capacitance manometers is 10
-
1
.
A. If the display is correct, then press the [
ENTER
] key.
B. If the display is incorrect, enter the correct sensor resolution, then press the [
ENTER
]
key.
The system responds by accepting the sensor resolution.
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