Chapter Seven: Operation in Setup Mode How To Perform Sensor Calibration/MFC Setu
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5. Use the arrow keys to select the gas type (n2 for nitrogen, HE for helium, and Ar for
argon), listed in the main display. The default gas type is nitrogen.
A. If the display is correct, then press the [
ENTER
] key.
B. If the display is incorrect, scroll to the correct gas type, then press the [
ENTER
] key.
The system responds by accepting the gas type, and blinking the center display.
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