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MKS 146C - Page 164

MKS 146C
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Chapter Five: Operation in Leakage Mode How To S
p
an a Sensor with a Reference
141
Note
1. Pirani gauges must be reading above 100 Torr, and the reference
channel must be within a decade of the Pirani channel for a valid span.
2. When spanning a Pirani gauge, the reference sensor can be anything
except an ion gauge. This includes another Pirani.
3. For a successful span of an ion gauge, the reference must be a
capacitance manometer. The capacitance manometer must be at least
a decade above its zero, reading within one decade (
±
) of the
unspanned ion gauge, and reading at or below 10 mTorr.
1. Repeatedly press the [
DISPLAY MODE
] key until the 146 unit is in Leakage Mode.
The system responds by scrolling through modes.
2. Press [
SPAN
/.], followed by [5/
DUAL
], followed by [1], [2], [3], or [4]
(lower range
sensor)
, followed by [1], [2], [3], or [4] again
(upper range sensor)
.
The system responds by spanning the sensor on the first channel to the reading of the
sensor on the second channel.
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