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MKS 146C - Chapter One: General Information; Introduction

MKS 146C
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List of Figures
xiv
Figure 31: Graph Showing Analog Set Point Defaults............................................................118
Figure 32: Adjusting Lower and Upper Points for Analog Set Point Calculations ..................119
Figure 33: Leakage Mode ......................................................................................................125
Figure 34: Software Version Number in Leakage Mode.........................................................128
Figure 35: Dual Channel Display in Leakage Mode...............................................................130
Figure 36: Zeroing a Sensor...................................................................................................133
Figure 37: Spanning a Sensor.................................................................................................138
Figure 38: Spanning a Sensor with a Reference......................................................................140
Figure 39: Graph Showing Analog Set Point Defaults............................................................143
Figure 40: Adjusting the Lower and Upper Points for the Analog Set Point Calculations.......144
Figure 41: Tuning Mode - Original Display...........................................................................152
Figure 42: The
SET POINT
legend displayed in Tuning Mode..............................................153
Figure 43: The Two Levels within Tuning Mode...................................................................158
Figure 44: Deviation Indicator...............................................................................................160
Figure 45: Tuning Mode Display when Adjusting the Valve Position ....................................162
Figure 46: Adjusting the Base Valve Position........................................................................164
Figure 47: Adjusting the Start Valve Position ........................................................................166
Figure 48: Adjusting the Integral Value .................................................................................168
Figure 49: Adjusting the Preset Valve Position......................................................................170
Figure 50: Adjusting the Gain Value......................................................................................174
Figure 51: Adjusting the Lead Value......................................................................................176
Figure 52: Adjusting the Set Point Value...............................................................................178
Figure 53: Setup Mode ..........................................................................................................181
Figure 54: Display for Setting Alarm Trip Points...................................................................188
Figure 55: Sensor Codes for Sensor Calibration.....................................................................191
Figure 56: Sensor Calibration for Capacitance Manometers ...................................................192
Figure 57: Calibration for Pirani and Convection Gauges.......................................................194
Figure 58: Sensor Calibration for Cold Cathode Gauges ........................................................196
Figure 59: Sensor Calibration for Hot Cathode Gauges..........................................................198
Figure 60: Sensor Calibration for Mass Flow Controllers.......................................................200
Figure 61: Sensor Calibration for Thermocouples ..................................................................202
Figure 62: Setting Up Dual Channel Displays........................................................................204
Figure 63: Display for Configuring an Analog Output............................................................208
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