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146C
MKS 146C User Manual
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120598-P1
Rev B, 3/99
Instruction M
anua
l
MK
S Ty
pe 146C
Clust
er Gaug
e
Vacuum Gauge Measur
ement
and Control S
y
stem
Si
x Sh
at
t
u
ck
R
oad
Andove
r, MA
01810-2449
(800) 227
-8766 o
r
(978
) 975-2350
Fax:
(978) 9
75-0093
E-
m
ai
l: mks
@mks
ins
t.co
m
W
eb sit
e:
ht
t
p://
www.m
ksinst.
c
om
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
1
3
Table of Contents
Table of Contents
6
List of Figures
16
Safety Information
24
Symbols Used in this Instruction Manual
24
Symbols Found on the Unit
25
Table 1: Definition of Symbols Found on the Unit
25
Safety Procedures and Precautions
26
Sicherheitshinweise
28
In dieser Betriebsanleitung Vorkommende Symbole
28
Am Gerät Angebrachte Symbole
29
Tabelle 2: Definitionen der am Gerät Angebrachten Symbole
29
Sicherheitsvorschriften und Vorsichtsmaßnahmen
30
Informations Relatives À la Sécurité
32
Symboles Utilisés Dans Ce Manuel D'utilisation
32
Symboles Apparaissant Sur L'appareil
33
Mesures de Sécurité Et Mises en Garde
34
Información sobre Seguridad
36
Símbolos Usados en el Manual de Instrucciones
36
Símbolos que Aparecen en la Unidad
37
Tabla 4: Definición de Los Símbolos que Aparecen en la Unidad
37
Procedimientos y Precauciones de Seguridad
38
Chapter One: General Information
40
Introduction
40
How this Manual Is Organized
41
Format of Instructions
42
Conventions Used in this Manual
42
Terminology Used in this Manual
43
Figure 1: the Front Panel of the 146 Instrument
44
Customer Support
45
Chapter Two: Installation
46
How to Unpack the 146 Instrument
46
Unpacking Checklist
46
Boards
47
Optional Accessories
47
Interface Cables
48
Generic Shielded Cable Description
48
Figure 2: Preferred Method
49
Figure 3: Alternate Method to Use When Cable Clamp Is Not Available
49
Figure 4: Rear Panel of the 146 Unit
50
Model Code Explanation
51
Figure 5: Model Code
51
Product Location and Requirements
52
Operating Environmental Requirements
52
Safety Conditions
52
Mounting Instructions
52
Electrical Requirements
52
System Requirements
53
Pressure Transducer Selection
53
Valve Selection
53
Mass Flow Controller Selection
53
Dimensions
54
Figure 6: Front Panel Dimensions
54
Figure 7: Top Dimensions
54
146 Set up
55
General
55
Figure 8: Side Dimensions
55
Checking the Fuses and AC Line Voltage Select Switch
56
Transducer/Mass Flow Controller Connections
56
Communication and Power Connections
56
Installing Boards in the 146 Unit
57
Figure 9: Opening the Type 146 Unit
57
Figure 10: Fastening Screw Positions
58
New Configuration Warning Code (C11)
60
146 Start up
61
Chapter Three: Overview
62
The Front Panel
62
The Power Switch
62
Figure 11: Front Panel of the Type 146 Instrument
62
Overview of Keys and Their Functions
63
What Happens When a Key Is Pressed
63
Table 5: Key Color Codes
63
Specific Keys and Their Functions
64
Table 6: Description of the Front Panel Keys
64
The Front Panel Window
66
Initial View Upon Power up
66
Figure 12: Full LCD Display
66
What to Look for
67
Figure 13: Explanation of the Front Panel Display
67
Table 7: Standard Front Panel Messages
68
Labels on the 146 Unit
69
Figure 14: Labels on the 146 Unit
69
Inside the Type 146 Unit
70
General Information
70
Capacitance Manometer Board
71
Table 8: Capacitance Manometer Pinout
71
Table 9: MKS Capacitance Manometers and Cables
72
Pirani/Convection
73
Table 10: Pirani/Convection Connector Pinout
73
Table 11: Pirani Sensors and Cables
73
Configuring the Dual Channel Pirani/Convection Board as Single Channel Board
74
Figure 15: Dual Pirani Board Connectors
75
Figure 16: Jumper Placement on the Pirani/Convection Board
75
Cold Cathode
77
Table 12: Cold Cathode Connector Pinout
77
Table 13: Cold Cathode Sensors and Cables
77
Hot Cathode
78
Table 14: Hot Cathode Coaxial Connector Pinout
78
Table 15: Hot Cathode Sensors and Cables
78
Table 16: Hot Cathode Type "D" Connector Pinout
79
Figure 17: Jumper Placement on the Hot Cathode Board
81
Thermocouple Board
82
Table 17: Thermocouple Connector Pinout
82
Table 18: Cabling Information for the Thermocouple Board
82
Configuring the Dual Thermocouple Board as Single Channel Board
83
Figure 18: Top Fastening Screw on the Dual Thermocouple Board
84
Figure 19: Jumper Placement on the Thermocouple Board
84
Mass Flow Controller Board
86
Table 19: Mass Flow Controller Connector Pinout
86
Table 20: Mass Flow Controllers and Cables
87
General I/O Connector
88
Table 21: General I/O Connector Pinout
88
Auxiliary Output Board
90
Table 22: Relay Output (Top) Connector Pinout
90
Table 23: Status/Analog Output (Bottom) Connector Pinout
90
Auxiliary Output Board - Fail-Safe Feature
91
Control Board
92
Table 24: Control Valve (Top) Connector Pinout
92
Table 25: Control Interface (Bottom) Connector Pinout
93
Table 26: Control Board Pin Jumpers
93
Table 27: Control Valves and Cables
94
Table 28: Flow Controllers and Cables
94
How to Configure the Control Board to Drive Different Valves
95
Figure 20: Jumper Placement on the Control Board
95
The Displayless Front Panel Connector Pinout
97
Table 29: Remote Front Panel Cables
97
Table 30: Front Panel Connector Pinout on the Displayless 146 Unit
98
The Binary Coded Decimal (BCD) Board
99
Table 31: BCD Board Pinout
99
The RS-232 Connector
100
Table 32: RS-232 Connector Pinout and Cables
100
Figure 21: Sample Display for each Mode
101
Overview of Modes
102
How to Tell Which Mode You Are in
102
How to Change from One Mode to Another
102
Overview of the Five Modes
103
Table 33: Normal and Leakage Mode Status Codes
103
Operational Diagram
105
Effects of Channel Changes
107
When a Channel's Condition Changes from Measuring to
107
Table 34: When a Channel's Condition Changes from Measuring to
107
When a Channel's Condition Changes to Measuring/Initializing from
108
Table 35: When a Channel's Condition Changes to Measuring/Initializing from
108
Overview of Alarms
109
Figure 22: Relay B During an Alarm Condition, When Configured as a Deactuated Relay
109
Figure 23: Relay B During an Alarm Condition, When Configured as an Actuated Relay
110
Table 36: Default Settings of the Trip Point Alarms
110
Alarm Conditions
111
System Design Elements
113
General Control Theory
113
Pressure Control
115
Mass Flow Control
116
Memory Storage in the 146 Instrument
118
Table 37: Data Stored in EEPROM During a Power Loss
118
Ion Gauge High Pressure Protection/Disconnect Detection
120
Displayless 146 Unit
121
Connecting to the Displayless 146 Unit
121
Figure 24: the Front of a Displayless 146 Unit
121
The LED
122
How to Establish RS-232 Communications
123
Chapter Four: Operation in Normal Mode
124
General Information
124
Figure 25: Normal Mode Display
124
Normal Mode Is Used When Performing the Following Procedures
125
Table 38: Normal Mode Functions
125
How to Display the Software Version
126
Figure 26: Software Version Number in Normal Mode
126
How to Switch Channels in the Main Display
127
Figure 27: Dual Channel Display in Normal Mode
128
How to Turn a Channel on or off
129
How to Turn an Alarm on or off
130
How to Zero a Sensor/Mfc
131
Figure 28: Zeroing a Sensor
131
Table 39: Ranges for Zeroing a Sensor
134
How to Toggle the Zero on and off
135
How to Span a Pirani Type Sensor to Atmosphere
136
Figure 29: Spanning a Pirani-Type Sensor
136
How to Span a Sensor with a Reference
138
Figure 30: Spanning a Sensor with a Reference
138
How to Toggle the Span on and off
140
How to Calculate the Analog Set Point
141
Figure 31: Graph Showing Analog Set Point Defaults
141
Figure 32: Adjusting Lower and Upper Points for Analog Set Point Calculations
142
How to Command an MFC Open Override
143
How to Command an MFC Close Override
144
How to Cancel an MFC Open/Close Override
144
How to Start Hot Cathode Low Power Degassing
145
How to Start Hot Cathode High Power Degassing
146
How to Stop Hot Cathode Degassing
147
Chapter Five: Operation in Leakage Mode
148
General Information
148
Figure 33: Leakage Mode
148
Leakage Mode Is Used When Performing the Following Procedures
150
Table 40: Leakage Mode Functions
150
How to Display the Software Version
151
Figure 34: Software Version Number in Leakage Mode
151
How to Switch Channels in the Main Display
152
Figure 35: Dual Channel Display in Leakage Mode
153
How to Turn a Channel on or off
154
How to Turn an Alarm on or off
155
How to Zero a Sensor/Mfc
156
Figure 36: Zeroing a Sensor
156
Table 41: Ranges for Zeroing a Sensor
159
How to Toggle the Zero on and off
160
How to Span a Pirani Type Sensor to Atmosphere
161
Figure 37: Spanning a Sensor
161
How to Span a Sensor with a Reference
163
Figure 38: Spanning a Sensor with a Reference
163
How to Toggle the Span on and off
165
How to Calculate the Analog Set Point
166
Figure 39: Graph Showing Analog Set Point Defaults
166
Figure 40: Adjusting the Lower and Upper Points for the Analog Set Point Calculations
167
How to Command an MFC Open Override
169
How to Command an MFC Close Override
169
How to Cancel an MFC Open/Close Override
170
How to Start Hot Cathode Low Power Degassing
171
How to Start Hot Cathode High Power Degassing
172
How to Stop Hot Cathode Degassing
173
Chapter Six: Operation in Tuning Mode
174
General Information
174
Figure 41: Tuning Mode - Original Display
174
The Front Panel Window
175
Figure 42: the SET POINT Legend Displayed in Tuning Mode
176
The Various Displays in Tuning Mode
177
Table 42: Summary of Tuning Mode Displays
178
Tuning Mode Is Used When Performing the Following Procedures
179
Table 43: Tuning Mode Functions
179
The Two Levels Within Tuning Mode
180
Figure 43: the Two Levels Within Tuning Mode
181
Keys
182
Table 44: Special Key Functions in Tuning Mode
182
The Deviation Indicator
183
Figure 44: Deviation Indicator
183
How to Change the Valve Position
185
Figure 45: Tuning Mode Display When Adjusting the Valve Position
185
How to Adjust Base
187
Figure 46: Adjusting the Base Valve Position
187
How to Adjust Start
189
Figure 47: Adjusting the Start Valve Position
189
How to Adjust Integral
191
Figure 48: Adjusting the Integral Value
191
How to Adjust Preset
193
Figure 49: Adjusting the Preset Valve Position
193
How to Edit Recipes (Gain, Lead, and Set Point)
195
How to Adjust Gain
197
Figure 50: Adjusting the Gain Value
197
How to Adjust Lead
199
Figure 51: Adjusting the Lead Value
199
How to Adjust Set Point
201
Figure 52: Adjusting the Set Point Value
201
Chapter Seven: Operation in Setup Mode
204
General Information
204
Figure 53: Setup Mode
204
The Various Displays in Setup Mode
205
Table 45: Summary of Setup Mode Displays
206
Table 46: Summary of Setup Mode Codes
207
Table 47: Setup Mode Procedures
208
Table 48: Setup Mode Functions
209
How to Set Alarm Trip Points
211
Figure 54: Display for Setting Alarm Trip Points
211
How to Perform Sensor Calibration/Mfc Setup
213
Table 49: Sensor Calibration Parameters for each Channel Type
213
Figure 55: Sensor Codes for Sensor Calibration
214
Capacitance Manometer
215
Figure 56: Sensor Calibration for Capacitance Manometers
215
Pirani and Convection Gauges
217
Figure 57: Calibration for Pirani and Convection Gauges
217
Cold Cathode
219
Figure 58: Sensor Calibration for Cold Cathode Gauges
219
Hot Cathode
221
Figure 59: Sensor Calibration for Hot Cathode Gauges
221
Mass Flow Controller
223
Figure 60: Sensor Calibration for Mass Flow Controllers
223
Thermocouple
225
Figure 61: Sensor Calibration for Thermocouples
225
How to Set up a Dual Channel Display
227
Figure 62: Setting up Dual Channel Displays
227
Table 50: Default Values for Dual Channel Displays
228
Two Types of Dual Channel Operation - Continuous and Discontinuous
229
How to Configure an Analog Output
231
Figure 63: Display for Configuring an Analog Output
231
Linear Scaling
232
Logarithmic Scaling
232
Set Point
232
Figure 64: Linear: Voltage Versus Pressure
232
Figure 65: Linear and Logarithmic: Voltage Versus Pressure
232
How to Adjust Miscellaneous Codes
234
Table 51: How to Adjust Miscellaneous Codes
234
Code 1: How to Select Pressure/Volt/Current
235
Figure 66: Code 1 Display
235
Code 2: How to Select Pressure Units
238
Figure 67: Code 2 Display
238
Code 3: How to Adjust Audio Alarms
239
Figure 68: Code 3 Display
239
Code 4: How to Adjust Alpha (PID Control)
241
Figure 69: Code 4 Display
241
Code 5: How to Configure the RS-232 Port
243
Figure 70: Code 5 Display
243
Code 7: How to Set the Display for Leakage Mode
245
Figure 71: Code 7 Display
245
Code 8: How to Edit the Data Logger Interval
247
Figure 72: Code 8 Display
247
Code 10X: How to Adjust the Display Lag
249
Figure 73: Code 10X Display
249
Code 11X: How to Turn Auto Zeroing on or off
251
Figure 74: Code 11X Display
251
Code 12X: How to Adjust the Auto Power Control
253
Figure 75: Code 12X Display
253
Code 13X: How to Adjust Softstart for Control
255
Figure 76: Code 13X Display
255
Code 14X: How to Select Control Settings
257
Figure 77: Code 14X Display
257
Code 15X: How to Set up the Analog Set Point
259
Figure 78: Code 15X Display
259
Figure 79: Graph Showing Analog Set Point Defaults
260
Code 16X: How to Set the HC Shutoff Features
262
Figure 80: Code 16X Display
262
Code 17X: How to Set up the MFC
264
Figure 81: Code 17X Display
264
Set Point Mode of Operation
265
Totaling Mode of Operation
265
Ratio Mode of Operation
265
Code 18X: How to Select the Convection Gauge
268
Figure 82: Code 18X Display
268
Chapter Eight: Operation in Control Mode
270
General Information
270
Control Mode Is Used When Performing the Following Procedures
270
Table 52: Control Mode Functions
270
Figure 83: Control Mode Screen
271
The Deviation Indicator
272
Figure 84: Deviation Indicator
272
The Rear Panel Override Indicator
273
How to Select the Active Recipe
274
How to Set the Valve to OPEN Position
274
How to Set the Valve to AUTO Position
275
How to Set the Valve to CLOSE Position
275
How to Set the Valve to HOLD Position
276
How to Set the Valve to MANUAL Position
276
Chapter Nine: RS-232 Communications
278
General Information
278
How to Establish RS-232 Communications
278
Table 53: RS-232 Communication Parameters
278
MKS RS-232 Protocol
279
Channel Numbering
279
Table 54: RS-232 Command Message Format
280
General Guidelines for RS-232 Messages
281
Command Messages
282
Power Control Messages
283
Table 55: Power Control Messages
283
Table 56: Chapter References for Power Control Messages
283
Calibration Messages
284
Table 57: Calibration Messages
284
Table 58: Chapter References for the Power Control Messages
285
Sensor Configuration Messages
286
Table 59: Sensor Configuration Messages
286
Table 60: Sensor Configuration Parameters for each Gauge Type
287
Table 61: Chapter References for Sensor Configuration Messages
287
Mass Flow Controller Messages
288
Table 62: Mass Flow Controller Messages
288
Table 63: Chapter References for Mass Flow Controller Messages
288
Dual Channel Setup Messages
289
Table 64: Dual Channel Setup Messages
289
Table 65: Chapter References for Dual Channel Setup Messages
289
Alarm Trip Point Messages
290
Table 66: Alarm Messages
290
Table 67: Chapter References for Alarm Messages
290
Analog Output Messages
292
Table 68: Analog Output Messages
292
Table 69: Chapter References for Analog Output Messages
292
Control Messages
293
Table 70: General Control Messages
293
Table 71: Chapter References for General Control Messages
293
Table 72: Control Adjust Messages
294
Table 73: Chapter References for Control Adjust Messages
294
Table 74: Recipe Specific Messages
295
Table 75: Chapter References for Recipe Specific Messages
295
Miscellaneous Messages
296
Table 76: Miscellaneous Messages
296
Table 77: Chapter References for Miscellaneous Messages
297
Read Only Messages
299
Table 78: Read Only Data Messages
299
Table 79: Response Format for Read Only Data Messages
300
Table 80: Chapter References for Read Only Data Messages
301
Table 81: Response to a Power up Status Message
305
Table 82: Read Only Status Messages
306
Table 83: Response Format for the Read Only Status Messages
306
Table 84: Chapter References for Read Only Status Messages
309
Error Messages
310
Table 85: Error Code Summary
310
Chapter Ten: Maintenance
312
General Information
312
How to Clean the Front Panel
312
How to Replace the Fuses
313
Table 86: Voltage Range and Fuse Selection
313
Chapter Eleven: Troubleshooting
314
The Diagnostics Feature
314
Starting the Diagnostics Feature
314
Performing 146 Instrument Self Tests
314
Figure 85: Initial Diagnostics Screen Display
314
Code 1: RAM Test
315
Figure 86: PASS Test Result Display from RAM Self-Test
315
Code 2: PROM Test
316
Code 3: Display Test
316
Code 4: Check All Keys
317
Table 87: Diagnostics Code 4 Key Press Results
317
Code 5: Beeper Test
318
Figure 87: the Keypad Test Result for the [+/-] Key
318
Figure 88: the Keypad Test Result for the [ QUIET / CANCEL ] Key
318
Code 5X: Relay Test
319
Figure 89: Rear Panel Output Test Display When All Bits Are High
319
Code 6: Rear Panel Status
320
Table 88: Hexadecimal Values Assigned to General I/O Connector Input Bits
320
Code 6X: Analog Outputs Check
321
Figure 90: Analog Output Test Display
321
Code 7X: Response Time for Fail-Safe Feature
322
Code 9999: Factory Calibration
323
Appendix A: Product Specifications
324
Physical Specifications
324
Electrical Specifications
325
Appendix B: Parts List/Accessories
326
Appendix C: RS-232 Error Codes
328
Error Code Summary
328
Table 89: RS-232 Error Code Summary
328
Appendix D: Front Panel Error/Status Messages
330
Table 90: Description of Front Panel Error/Status Messages
330
Appendix E: Instrument Default Values
332
Appendix F: Underrange and Overrange Values
336
Appendix G: Board Specific Commands
338
General Information
338
Capacitance Manometer Messages
339
Pirani/Convection Messages
341
Cold Cathode Messages
343
Hot Cathode Messages
345
Mass Flow Controller Messages
347
Thermocouple Messages
349
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MKS 146C Specifications
General
Brand
MKS
Model
146C
Category
Measuring Instruments
Language
English
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