MKS 146C - Page 20

List of Tables
xvii
List of Tables
Table 1: Definition of Symbols Found on the Unit .....................................................................2
Tabelle 2: Definitionen der am Gerät angebrachten Symbole......................................................6
Tableau 3: Définition des symboles apparaissant sur l'appareil .................................................10
Tabla 4: Definición de los símbolos que aparecen en la unidad.................................................14
Table 5: Key Color Codes ........................................................................................................40
Table 6: Description of the Front Panel Keys............................................................................41
Table 7: Standard Front Panel Messages...................................................................................45
Table 8: Capacitance Manometer Pinout...................................................................................48
Table 9: MKS Capacitance Manometers and Cables.................................................................49
Table 10: Pirani/Convection Connector Pinout.........................................................................50
Table 11: Pirani Sensors and Cables.........................................................................................50
Table 12: Cold Cathode Connector Pinout................................................................................54
Table 13: Cold Cathode Sensors and Cables.............................................................................54
Table 14: Hot Cathode Coaxial Connector Pinout.....................................................................55
Table 15: Hot Cathode Sensors and Cables...............................................................................55
Table 16: Hot Cathode Type “D” Connector Pinout..................................................................56
Table 17: Thermocouple Connector Pinout...............................................................................59
Table 18: Cabling Information for the Thermocouple Board.....................................................59
Table 19: Mass Flow Controller Connector Pinout ...................................................................63
Table 20: Mass Flow Controllers and Cables............................................................................64
Table 21: General I/O Connector Pinout...................................................................................65
Table 22: Relay Output (Top) Connector Pinout.......................................................................67
Table 23: Status/Analog Output (Bottom) Connector Pinout ....................................................67
Table 24: Control Valve (Top) Connector Pinout .....................................................................69
Table 25: Control Interface (Bottom) Connector Pinout............................................................70
Table 26: Control Board Pin Jumpers.......................................................................................70
Table 27: Control Valves and Cables........................................................................................71
Table 28: Flow Controllers and Cables.....................................................................................71
Table 29: Remote Front Panel Cables.......................................................................................74
Table 30: Front Panel Connector Pinout on the Displayless 146 Unit .......................................75
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