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MKS 146C - Page 202

MKS 146C
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Chapter Six: Operation in Tuning Mode How To Ad
j
ust Set Point
179
Note
If the
MANUAL
or
HOLD
legend is displayed,
and
the right display
shows the Edit Reci
p
e
p
arameter (E1, E2, E3, or E4), the left dis
p
la
y
will
blink. The left display is flashing the current control valve position.
Since we want to edit a recipe, you may ignore the blinking left display
and proceed to the next step.
3. Press the [
DEGAS
/
SET POINT
] key,
or
scroll through the Tuning Mode parameters
with the arrow keys until the
SET POINT
legend is displayed, then press the [
ENTER
]
key.
The system responds by changing the window parameters, and causing the left display to
blink.
4. Enter a Set Point value between ±100,000 Torr (the default is 0).
A. If the Set Point is already correct, press the [
ENTER
] key.
B. If the Set Point is incorrect, use the [
ZERO
/
EXP
] , [+/-] , and numeral keys to
enter the correct Set Point value, then press the [
ENTER
] key.
The system responds by accepting the Set Point.
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