MKS 146C - Page 258

Chapter Seven: Operation in Setup Mode Code 14x: How To Select Control Settin
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1. Repeatedly press the [
DISPLAY MODE
] key until the 146 unit is in Setup Mode.
The system responds by scrolling through modes.
2. Use the arrow keys to scroll to the
CODE
legend.
The system responds by causing the left display to blink.
3. Enter the number
14x
(where
x
represents a recipe number, the default recipe is 1),
and press the [
ENTER
] key.
The system responds by displaying the appropriate parameters for code 14x, and causing
the main display to blink.
4. Select dir (direct) or rEV (reverse) polarity. The default is direct polarity.
For upstream control, the rEV (reverse) polarity is used to decrease the upstream valve’s
output as pressure rises in the process chamber. For downstream control, the dir (direct)
polarity is used to increase the downstream valve’s output as pressure rises in the process
chamber. This polarity setting applies to all recipes.
A. If the display is correct, press the [
ENTER
] key.
B. If the display is not correct, use the arrow keys to select the correct polarity direction,
then press the [
ENTER
] key.
The system responds by accepting the polarity direction, and causing the right display to
blink.
Note
Although the polarity can be modified within any recipe, only the last
entered polarity is saved and used for all recipes.
5. Enter the input channel number (the default is input channel 1).
The input channel provides the signal that is fed into the control loop. The channel
chosen becomes associated with the selected recipe. The default entry for all recipes is
input channel 1.
Note
The two Dual Channels cannot be used as input channels.
Either
one
of the two channels used in Dual Channel display, however,
can be used as an input channel.
A. If the display is correct, press the [
ENTER
] key.
B. If the display is not correct, enter the correct channel number (1 through 4), then
press the [
ENTER
] key.
The system responds by accepting the input channel.
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