Appendix E: Instrument Default Values Default Values
311
Polarity Direct
Preset 99.8% (range 0 to 103% of full open)
Protocol MKS Protocol
Set Point 0 (range ± 100,000 Torr)
Softstart
Speed value
Status
10 (range 1.0 to 990 seconds)
Disabled
SPAN
(for all recipes) 1
Start 0 (range 0 to 103% of full open)
Unit Torr
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