EasyManua.ls Logo

MKS 146C - Page 334

MKS 146C
358 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
Appendix E: Instrument Default Values Default Values
311
Polarity Direct
Preset 99.8% (range 0 to 103% of full open)
Protocol MKS Protocol
Set Point 0 (range ± 100,000 Torr)
Softstart
Speed value
Status
10 (range 1.0 to 990 seconds)
Disabled
SPAN
(for all recipes) 1
Start 0 (range 0 to 103% of full open)
Unit Torr
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Table of Contents

Related product manuals