MKS 146C - Page 344

Appendix G: Board Specific Commands Cold Cathode Messa
g
es
321
Cold Cathode Messages (Continued)
Function Description Command Range and Restrictions
Status Report channel
condition
@608<para>? <para> is the channel number 1, 2, 3, or 4
Request only -
Sensor must be installed
Report reading
with time stamp
@602<para>? <para> is the channel number 1, 2, 3, or 4
Request only -
Sensor must be installed
Report channel
reading
@601<para>? <para> is the channel number 1, 2, 3, or 4
Request only -
Sensor must be installed
Report sensor
voltage
@603<para>? <para> is the channel number 1, 2, 3, or 4
Request only -
Sensor must be installed
Report sensor ion
current
@604<para>? <para> is the channel number 1, 2, 3, or 4
Request only -
Sensor must be installed
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