MKS 146C - Page 348

Appendix G: Board Specific Commands Mass Flow Controller Messa
g
es
325
Mass Flow Controller Messages
Function Description Command Range and Restrictions
Status Report MFC
status
@608<para>? <para> is the channel number 1, 2, 3, or 4
Request only -
MFC must be installed
Report MFC
flow rate
@601<para>? <para> is the channel number 1, 2, 3, or 4
Request only -
MFC must be installed
Report MFC
flow rate
with time
stamp
@602<para>? <para> is the channel number 1, 2, 3, or 4
Request only -
MFC must be installed
Report MFC
voltage
@603<para>? <para> is the channel number 1, 2, 3, or 4
Request only -
MFC must be installed
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