Newport XPS-D - Page 695

XPS Unified Programmer’s Manual
45
Trajectory state
46
Slave state due to a SlaveEnable command
47
Jogging state due to a JogEnable command
48
Analog tracking state due to a TrackingEnable command
49
Analog interpolated encoder calibrating state
50
NOTINIT state due to a mechanical zero inconsistency during homing
51
Spinning state due to a SpinParametersSet command
52
NOTINIT state due to a clamping timeout
55
Clamped
56
Ready state from clamped
58
Disabled state due to a following error during clamped
59
Disabled state due to a motion done timeout during clamped
60
NOTINIT state due to a group interlock error on not reference state
61
NOTINIT state due to a group interlock error during homing
63
NOTINIT state due to a motor initialization error
64
Referencing state
65
Clamping initialization
66
NOTINIT state due to a perpendicularity error homing
67
NOTINIT state due to a master/slave error during homing
68
Auto-tuning state
69
Scaling calibration state
70
Ready state from auto-tuning
71
NOTINIT state from scaling calibration
72
NOTINIT state due to a scaling calibration error
73
Excitation signal generation state
74
Disable state due to a following error on excitation signal generation state
75
Disable state due to a master/slave error on excitation signal generation state
76
Disable state due to an emergency stop on excitation signal generation state
77
Ready state from excitation signal generation
78
Focus state
79
Ready state from focus
80
Disable state due to a following error on focus state
81
Disable state due to a master/slave error on focus state
82
Disable state due to an emergency stop on focus state
83
NOTINIT state due to a group interlock error
84
Disable state due to a group interlock error during moving
85
Disable state due to a group interlock error during jogging
86
Disable state due to a group interlock error on slave state
87
Disable state due to a group interlock error during trajectory
88
Disable state due to a group interlock error during analog tracking
89
Disable state due to a group interlock error during spinning
90
Disable state due to a group interlock error on ready state
91
Disable state due to a group interlock error on auto-tuning state
92
Disable state due to a group interlock error on excitation signal generation
state
93
Disable state due to a group interlock error on focus state
94
Disabled state due to a motion done timeout during jogging
95
Disabled state due to a motion done timeout during spinning
681 EDH0373En1023 — 01/18