Newport XPS-D - Page 696

XPS Unified Programmer’s Manual
96
Disabled state due to a motion done timeout during slave mode
97
Disabled state due to a ZYGO error during motion
98
Disabled state due to a master/slave error during trajectory
99
Disable state due to a ZYGO error on jogging state
100
Disabled state due to a ZYGO error during analog tracking
101
Disable state due to a ZYGO error on auto-tuning state
102
Disable state due to a ZYGO error on excitation signal generation state
103
Disabled state due to a ZYGO error on ready state
104
Driver initialization
105
Jitter initialization
106
Not initialized state due to an error with GroupKill or KillAll command
EDH0373En1023 — 01/18 682