Newport XPS-D - Page 700

XPS Unified Programmer’s Manual
-211
Not expected position after motion
-212
MagneticTrackPositionAtHome value is out of tolerance and can not
be applied.
-1000
Zygo command execution failed
-1001
The controller is not connected to Zygo TCP server. Run
ZygoStartInterferometer API.
-1002
Connection to Zygo TCP server failed
-1003
The XPS controller is already connected to Zygo TCP server
-1004
Zygo signal is not present
-1005
Zygo PEG configuration failed
-1006
Zygo error detected
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