Table of Contents
ix
General Information................................................................................................... 247
Control Mode is Used when Performing the Following Procedures ............... 247
The Deviation Indicator................................................................................. 249
The Rear Panel Override Indicator................................................................. 250
How To Select the Active Recipe............................................................................... 251
How To Set the Valve to OPEN Position................................................................... 251
How To Set the Valve to AUTO Position .................................................................. 252
How To Set the Valve to CLOSE Position................................................................. 252
How To Set the Valve to HOLD Position .................................................................. 253
How To Set the Valve to MANUAL Position ............................................................ 253
Chapter Nine: RS-232 Communications................................................................................ 255
General Information................................................................................................... 255
How To Establish RS-232 Communications.................................................. 255
MKS RS-232 Protocol .................................................................................. 256
Channel Numbering ...................................................................................... 256
General Guidelines for RS-232 Messages...................................................... 258
Command Messages .................................................................................................. 259
Power Control Messages............................................................................... 260
Calibration Messages .................................................................................... 261
Sensor Configuration Messages..................................................................... 263
Mass Flow Controller Messages.................................................................... 265
Dual Channel Setup Messages....................................................................... 266
Alarm Trip Point Messages........................................................................... 267
Analog Output Messages............................................................................... 269
Control Messages.......................................................................................... 270
Miscellaneous Messages................................................................................ 273
Read Only Messages..................................................................................... 276
Error Messages.......................................................................................................... 287
Chapter Ten: Maintenance..................................................................................................... 289
General Information................................................................................................... 289
How To Clean the Front Panel................................................................................... 289
How To Replace the Fuses......................................................................................... 290
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