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Table of Contents

viii

Capacitance Manometer.................................................................................192

Pirani and Convection Gauges .......................................................................194

Cold Cathode.................................................................................................196

Hot Cathode...................................................................................................198

Mass Flow Controller ....................................................................................200

Thermocouple................................................................................................202

How To Set Up a Dual Channel Display.....................................................................204

Two Types of Dual Channel Operation - Continuous and Discontinuous .......206

How To Configure an Analog Output.........................................................................208

Linear Scaling................................................................................................209

Logarithmic Scaling.......................................................................................209

Set Point........................................................................................................209

How To Adjust Miscellaneous Codes.........................................................................211

Code 1: How To Select Pressure/Volt/Current...........................................................212

Code 2: How To Select Pressure Units......................................................................215

Code 3: How To Adjust Audio Alarms......................................................................216

Code 4: How To Adjust Alpha (PID Control)............................................................218

Code 5: How To Configure the RS-232 Port .............................................................220

Code 7: How To Set the Display for Leakage Mode..................................................222

Code 8: How To Edit the Data Logger Interval..........................................................224

Code 10x: How To Adjust the Display Lag ...............................................................226

Code 11x: How To Turn Auto Zeroing ON or OFF...................................................228

Code 12x: How To Adjust the Auto Power Control...................................................230

Code 13x: How To Adjust Softstart for Control.........................................................232

Code 14x: How To Select Control Settings ...............................................................234

Code 15x: How To Set Up the Analog Set Point .......................................................236

Code 16x: How To Set the HC Shutoff Features........................................................239

Code 17x: How To Set Up the MFC..........................................................................241

Set Point Mode of Operation..........................................................................242

Totaling Mode of Operation...........................................................................242

Ratio Mode of Operation ...............................................................................242

Code 18x: How To Select the Convection Gauge ......................................................245

Chapter Eight: Operation in Control Mode.............................................................................247

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MKS 146C User Manual

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