Table of Contents
vii
How To Span a Pirani Type Sensor to Atmosphere.................................................... 138
How To Span a Sensor with a Reference.................................................................... 140
How To Toggle the Span On and Off......................................................................... 142
How To Calculate the Analog Set Point..................................................................... 143
How To Command an MFC Open Override............................................................... 146
How To Command an MFC Close Override .............................................................. 146
How To Cancel an MFC Open/Close Override .......................................................... 147
How To Start Hot Cathode Low Power Degassing..................................................... 148
How To Start Hot Cathode High Power Degassing .................................................... 149
How To Stop Hot Cathode Degassing........................................................................ 150
Chapter Six: Operation in Tuning Mode................................................................................ 151
General Information................................................................................................... 151
The Front Panel Window............................................................................... 152
The Various Displays in Tuning Mode.......................................................... 154
Tuning Mode is Used when Performing the Following Procedures................ 156
The Two Levels within Tuning Mode............................................................ 157
Keys.............................................................................................................. 159
The Deviation Indicator................................................................................. 160
How To Change the Valve Position ........................................................................... 162
How To Adjust Base.................................................................................................. 164
How To Adjust Start.................................................................................................. 166
How To Adjust Integral ............................................................................................. 168
How To Adjust Preset................................................................................................ 170
How To Edit Recipes (Gain, Lead, and Set Point)...................................................... 172
How To Adjust Gain.................................................................................................. 174
How To Adjust Lead.................................................................................................. 176
How To Adjust Set Point........................................................................................... 178
Chapter Seven: Operation in Setup Mode.............................................................................. 181
General Information................................................................................................... 181
The Various Displays in Setup Mode ............................................................ 182
How To Set Alarm Trip Points .................................................................................. 188
How To Perform Sensor Calibration/MFC Setup ....................................................... 190
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