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MKS 146C User Manual

MKS 146C
358 pages
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Table of Contents
vi
Displayless 146 Unit ..................................................................................................98
Connecting to the Displayless 146 Unit .........................................................98
The LED........................................................................................................99
How To Establish RS-232 Communications ..................................................100
Chapter Four: Operation in Normal Mode..............................................................................101
General Information ...................................................................................................101
Normal Mode is Used when Performing the Following Procedures................102
How To Display the Software Version .......................................................................103
How To Switch Channels in the Main Display ...........................................................104
How To Turn a Channel ON or OFF ..........................................................................106
How To Turn an Alarm ON or OFF ...........................................................................107
How To Zero a Sensor/MFC ......................................................................................108
How To Toggle the Zero On and Off..........................................................................112
How To Span a Pirani Type Sensor to Atmosphere ....................................................113
How To Span a Sensor with a Reference....................................................................115
How To Toggle the Span On and Off .........................................................................117
How To Calculate the Analog Set Point .....................................................................118
How To Command an MFC Open Override ...............................................................120
How To Command an MFC Close Override...............................................................121
How To Cancel an MFC Open/Close Override...........................................................121
How To Start Hot Cathode Low Power Degassing .....................................................122
How To Start Hot Cathode High Power Degassing.....................................................123
How To Stop Hot Cathode Degassing ........................................................................124
Chapter Five: Operation in Leakage Mode.............................................................................125
General Information ...................................................................................................125
Leakage Mode is Used when Performing the Following Procedures...............127
How To Display the Software Version .......................................................................128
How To Switch Channels in the Main Display ...........................................................129
How To Turn a Channel ON or OFF ..........................................................................131
How To Turn an Alarm ON or OFF ...........................................................................132
How To Zero a Sensor/MFC ......................................................................................133
How To Toggle the Zero On and Off..........................................................................137
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Table of Contents

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MKS 146C Specifications

General IconGeneral
BrandMKS
Model146C
CategoryMeasuring Instruments
LanguageEnglish

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