Table of Contents
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Capacitance Manometer Board...................................................................... 48
Pirani/Convection.......................................................................................... 50
Configuring the Dual Channel Pirani/Convection Board as Single
Channel Board .............................................................................................. 51
Cold Cathode ................................................................................................ 54
Hot Cathode.................................................................................................. 55
Thermocouple Board..................................................................................... 59
Configuring the Dual Thermocouple Board as Single Channel Board............ 60
Mass Flow Controller Board ......................................................................... 63
General I/O Connector................................................................................... 65
Auxiliary Output Board................................................................................. 67
Auxiliary Output Board - Fail-Safe Feature................................................... 68
Control Board ............................................................................................... 69
How To Configure the Control Board to Drive Different Valves ................... 72
The Displayless Front Panel Connector Pinout.............................................. 74
The Binary Coded Decimal (BCD) Board...................................................... 76
The RS-232 Connector.................................................................................. 77
Overview of Modes ................................................................................................... 79
How To Tell which Mode You Are In........................................................... 79
How To Change from One Mode to Another................................................. 79
Overview of the Five Modes ......................................................................... 80
Operational Diagram.................................................................................................. 82
Effects of Channel Changes ....................................................................................... 84
When a Channel’s Condition Changes from Measuring To . . ....................... 84
When a Channel’s Condition Changes to Measuring/Initializing From . ....... 85
Overview of Alarms................................................................................................... 86
Alarm Conditions.......................................................................................... 88
System Design Elements............................................................................................ 90
General Control Theory................................................................................. 90
Pressure Control............................................................................................ 92
Mass Flow Control........................................................................................ 93
Memory Storage in the 146 Instrument.......................................................... 95
Ion Gauge High Pressure Protection/Disconnect Detection............................ 97
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