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MKS 146C User Manual

MKS 146C
358 pages
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Table of Contents
iv
Interface Cables .............................................................................................25
Generic Shielded Cable Description...............................................................25
Model Code Explanation ...............................................................................28
Product Location and Requirements ...........................................................................29
Operating Environmental Requirements.........................................................29
Safety Conditions ..........................................................................................29
Mounting Instructions....................................................................................29
Electrical Requirements.................................................................................29
System Requirements.................................................................................................30
Pressure Transducer Selection........................................................................30
Valve Selection..............................................................................................30
Mass Flow Controller Selection.....................................................................30
Dimensions................................................................................................................31
146 Set Up .................................................................................................................32
General..........................................................................................................32
Checking the Fuses and AC line Voltage Select Switch .................................33
Transducer/Mass Flow Controller Connections..............................................33
Communication and Power Connections........................................................33
Installing Boards in the 146 Unit ...................................................................34
New Configuration Warning Code (C11).......................................................37
146 Start Up...............................................................................................................38
Chapter Three: Overview.......................................................................................................39
The Front Panel..........................................................................................................39
The Power Switch..........................................................................................39
Overview of Keys and Their Functions.......................................................................40
What Happens when a Key is Pressed............................................................40
Specific Keys and Their Functions.................................................................41
The Front Panel Window............................................................................................43
Initial View Upon Power Up..........................................................................43
What to Look For ..........................................................................................44
Labels on the 146 Unit ...............................................................................................46
Inside the Type 146 Unit............................................................................................47
General Information.......................................................................................47
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MKS 146C Specifications

General IconGeneral
BrandMKS
Model146C
CategoryMeasuring Instruments
LanguageEnglish

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