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Alignment
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8
Appendices
Vision System FH/FZ5 Series
User’s Manual (Z340)
● Machine Simulator
The Machine Simulator processing item allows you to see how the alignment marks move on the image while
each axes of the stage or robot is being controlled. You can use it to verify the operation of the alignment
processing items even if the actual stage or robot is not available. The following example uses two Cameras
to describe the use of the Machine Simulator processing item to verify the operation of a Vision Master
Calibration processing item.
Example: Usage Example for Two Cameras
Camera Image Input processing item · · · Select Camera 0.
↓
Machine setting processing item · · · Register [stage data] or [robot data] depending on the external device to
be used, and then set the information for the external device.
The machine settings processing item can be programmed anywhere
other than at the beginning of the flow.
↓
Set Unit Data processing item · · · Register processing unit data setting processing items for the number of
axes in the selected external device.
For example, if you selected an XYθ stage, there are three axes. You
would register three units in the flow.
• Target unit: The next registered Machine Simulator processing item
• Data No.: Each axis movement (number 128 to 135)
• Settings data: The next set of axis movements (NMX to NMR) for the
Vision Master Calibration processing item
↓
Machine Simulator processing item · · ·
Set the machine setting processing item to reference, and then set the
conditions of the actual coordinates to confirm
↓
Position measurement processing item · · · Measure the position of the alignment marks, or the position of a special
feature of the workpiece from the image in Camera 0.
Out of the general measurement processing items (Inspections and
Measurements), you can use processing items with measurement
results that have an X and Y in the calculation strings.
To output the position on the image, set [Calibration] on the [Output
parameter] tab page to OFF.
↓
Camera Switching processing item · · · Select Camera 1.
↓
Set Unit Data processing item · · · Register processing unit data setting processing items for the number of
axes in the selected external device.
For example, if you selected an XYθ stage, there are three axes. You
would register three units in the flow.
• Target unit: The next registered Machine Simulator processing item
• Data No.: Each axis movement (number 128 to 135)
• Settings data: The next set of axis movements (NMX to NMR) for the
Vision Master Calibration processing item
↓
Machine Simulator processing item · · ·
Set the machine setting processing item to reference, and then set the
conditions of the actual coordinates to confirm
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