CONTENTS
1-2-12-9 Setting a Lower Scan Speed ......................................................................... 1-51
1-2-12-10 Stopping Repeated Scanning...................................................................... 1-52
1-2-13 Adjusting the Detection Light Axis............................................................1-52
1-2-14 Acquiring Image.......................................................................................1-52
1-2-15 Saving Image ...........................................................................................1-54
1-2-16 Exiting from the Software.........................................................................1-55
1-2-17 Turning Power Off....................................................................................1-56
1-3 Online Help..................................................................................... 1-57
1-3-1 Referencing Method...................................................................................1-57
1-3-2 Setup of Microscope and Scan Unit ...........................................................1-58
1-3-2-1 Configuring the Microscope............................................................................. 1-61
1-3-2-2 Configuring the Scan Unit ............................................................................... 1-63
1-3-2-3 Configuring the Filters ..................................................................................... 1-64
1-3-2-4 Configuring the Microscope (Combination with BX51, BX61, IX81) ............... 1-66
1-3-2-5 Parfocality Correction and Jog Sensitivity Adjustment (When the BX or IX is
used)................................................................................................................ 1-72
2 APPLIED OPERATIONS 2-1
2-1 General Operation Procedure......................................................... 2-1
2-1-1 Image Acquisition Procedure (Section (A)) ..................................................2-3
2-1-2 Image Acquisition Procedure in an Observation Mode (Section (B)) ............2-4
2-1-3 Examples of Operation Procedures .............................................................2-5
2-2 Image Acquisition............................................................................ 2-7
2-2-1 Image Acquisition in XY Observation Mode .................................................2-8
2-2-1-1 Configuring the Microscope............................................................................... 2-9
2-2-1-2 Configuring the Scan Unit ............................................................................... 2-13
2-2-1-3 Setting the Observation Condition................................................................... 2-14
2-2-1-4 Acquiring Image .............................................................................................. 2-22
2-2-1-5 Acquiring Image in Accumulation Mode.......................................................... 2-22
2-2-1-6 Saving the Acquired Image in File................................................................... 2-26
2-2-2 Image Acquisition in Other Observation Modes .........................................2-27
2-2-2-1 XZ Observation Mode ..................................................................................... 2-27
2-2-2-2 XT Observation Mode ..................................................................................... 2-33
2-2-2-3 XZT Observation Mode ................................................................................... 2-35
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