Agilent 5DX Service Guide 5-1
5.Panel Handling Subsystem
In this chapter...
This chapter includes the following topics:
n Panel Handling Subsystem Introduction, 5-2
n Agilent 5DX Panel Handling Configurations, 5-4
n SMEMA Interface Standards, 5-6
n Panel Handling Subsystem Components, 5-13
n X-ray Cabinet and Barriers, 5-14
n XYZ Stage Assembly, 5-16
n Motion Control Assembly, 5-28
n Motion Controller PCI Cards, 5-38
n Digital I/O Assembly, 5-42
n Panel Handling Software, 5-51
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