Agilent 5DX Service Guide 10-43
5DX Series 3 Software Diagnostics
Run Position Repeatability Test
Maintenance Frequency: Monthly
Estimated Time: Five minutes
Required Items:
5DX Confirmation and Adjustment Panel
Prerequisite:
The 5DX Confirmation and Adjustment Panel must be loaded.
Special Notes:
None
Information:
None
Procedure:
1. Select XYZ Stage > Position Repeatability from the Service menu and
press Enter.
2. Accept the recommended defaults when prompted. Select Random positions.
3. The test passes if the deviation is less than 5 pixels. If it doesn’t pass, call the
Agilent Response Center for assistance.
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